Beijing East Star Applied Physics Institute has been an integral part of the microelectronics and semiconductor manufacturing R&D landscape in China for over 30 years. Originally commissioned in 1988 by the Chinese Academy of Sciences, we have been operating as an independent commercial entity since 2003, working closely with academic and commercial organizations, private and public alike.

Our specialization is RTP (Rapid Thermal Processing) lab-equipment design, manufacturing, customization and servicing. We have an 80% share of the academic RTP research market in mainland China, working closely with all top-tier universities (e.g. Tsinghua University, Peking University), CAS institutes and national laboratories (e.g. The Institute of Semiconductors). In recent years we have broadened our reach tentatively overseas (e.g. Hong Kong, Singapore, Turkey, USA) and to leading domestic semiconductor manufacturers. Our RTP series products have contributed to and been mentioned in many papers published in top-tier international academic journals.